7/7/2010	8:16:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	8:16:53 AM	Recipe started at 8:16 AM
7/7/2010	8:16:53 AM	H2 valve closed
7/7/2010	8:16:53 AM	BCl3 valve closed
7/7/2010	8:16:53 AM	PH3 valve closed
7/7/2010	8:16:53 AM	SiCl4 pre valve closed
7/7/2010	8:16:53 AM	SiCl4 post valve closed
7/7/2010	8:16:53 AM	Main Vac valve closed
7/7/2010	8:16:53 AM	Bypass valve closed
7/7/2010	8:16:53 AM	Bubbler valve closed
7/7/2010	8:16:53 AM	Helium valve opened
7/7/2010	8:16:53 AM	Helium MFC set to  500.000000
7/7/2010	8:16:53 AM	H2 MFC set to  0.000000
7/7/2010	8:16:53 AM	BCl3 MFC set to  0.000000
7/7/2010	8:16:53 AM	PHl3 MFC set to  0.000000
7/7/2010	8:16:53 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:16:53 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:16:53 AM	Tube furnace set to 0
7/7/2010	8:18:13 AM	Helium valve closed
7/7/2010	8:18:13 AM	H2 valve closed
7/7/2010	8:18:13 AM	BCl3 valve closed
7/7/2010	8:18:13 AM	PH3 valve closed
7/7/2010	8:18:13 AM	SiCl4 pre valve closed
7/7/2010	8:18:13 AM	SiCl4 post valve closed
7/7/2010	8:18:13 AM	Main Vac valve closed
7/7/2010	8:18:13 AM	Bypass valve closed
7/7/2010	8:18:13 AM	Bubbler valve closed
7/7/2010	8:18:13 AM	Helium MFC set to  0.000000
7/7/2010	8:18:13 AM	H2 MFC set to  0.000000
7/7/2010	8:18:13 AM	BCl3 MFC set to  0.000000
7/7/2010	8:18:13 AM	PHl3 MFC set to  0.000000
7/7/2010	8:18:13 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:18:13 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:18:14 AM	Tube furnace set to 0
7/7/2010	8:18:14 AM	Run finished at 8:18 AM
7/7/2010	8:18:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	8:25:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	8:25:05 AM	Recipe started at 8:25 AM
7/7/2010	8:25:05 AM	Helium valve closed
7/7/2010	8:25:05 AM	H2 valve closed
7/7/2010	8:25:05 AM	BCl3 valve closed
7/7/2010	8:25:05 AM	PH3 valve closed
7/7/2010	8:25:05 AM	SiCl4 pre valve closed
7/7/2010	8:25:05 AM	SiCl4 post valve closed
7/7/2010	8:25:05 AM	Main Vac valve closed
7/7/2010	8:25:05 AM	Bubbler valve closed
7/7/2010	8:25:05 AM	Bypass valve opened
7/7/2010	8:25:05 AM	Helium MFC set to  0.000000
7/7/2010	8:25:05 AM	H2 MFC set to  0.000000
7/7/2010	8:25:05 AM	BCl3 MFC set to  0.000000
7/7/2010	8:25:05 AM	PHl3 MFC set to  0.000000
7/7/2010	8:25:05 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:25:05 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:25:05 AM	Tube furnace set to 0
7/7/2010	8:25:54 AM	Helium valve closed
7/7/2010	8:25:54 AM	H2 valve closed
7/7/2010	8:25:54 AM	BCl3 valve closed
7/7/2010	8:25:54 AM	PH3 valve closed
7/7/2010	8:25:54 AM	SiCl4 pre valve closed
7/7/2010	8:25:54 AM	SiCl4 post valve closed
7/7/2010	8:25:54 AM	Bubbler valve closed
7/7/2010	8:25:54 AM	Main Vac valve opened
7/7/2010	8:25:54 AM	Bypass valve opened
7/7/2010	8:25:54 AM	Helium MFC set to  0.000000
7/7/2010	8:25:54 AM	H2 MFC set to  0.000000
7/7/2010	8:25:54 AM	BCl3 MFC set to  0.000000
7/7/2010	8:25:54 AM	PHl3 MFC set to  0.000000
7/7/2010	8:25:54 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:25:54 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:25:54 AM	Tube furnace set to 0
7/7/2010	8:25:54 AM	Run finished at 8:25 AM
7/7/2010	8:25:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	8:26:29 AM	Tube furnace set to 200
7/7/2010	8:27:51 AM	Helium MFC set to  75.000000
7/7/2010	8:27:52 AM	Helium valve opened
7/7/2010	8:34:32 AM	Helium valve closed
7/7/2010	8:35:24 AM	Helium valve opened
7/7/2010	8:35:29 AM	Tube furnace set to 250
7/7/2010	8:39:47 AM	Helium valve closed
7/7/2010	8:42:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	8:42:01 AM	Recipe started at 8:42 AM
7/7/2010	8:42:01 AM	H2 valve closed
7/7/2010	8:42:01 AM	BCl3 valve closed
7/7/2010	8:42:01 AM	PH3 valve closed
7/7/2010	8:42:01 AM	SiCl4 pre valve closed
7/7/2010	8:42:01 AM	SiCl4 post valve closed
7/7/2010	8:42:01 AM	Main Vac valve closed
7/7/2010	8:42:01 AM	Bypass valve closed
7/7/2010	8:42:01 AM	Bubbler valve closed
7/7/2010	8:42:01 AM	Helium valve opened
7/7/2010	8:42:01 AM	Helium MFC set to  500.000000
7/7/2010	8:42:01 AM	H2 MFC set to  0.000000
7/7/2010	8:42:01 AM	BCl3 MFC set to  0.000000
7/7/2010	8:42:01 AM	PHl3 MFC set to  0.000000
7/7/2010	8:42:01 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:42:01 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:42:01 AM	Tube furnace set to 0
7/7/2010	8:43:18 AM	Helium valve closed
7/7/2010	8:43:18 AM	H2 valve closed
7/7/2010	8:43:18 AM	BCl3 valve closed
7/7/2010	8:43:18 AM	PH3 valve closed
7/7/2010	8:43:18 AM	SiCl4 pre valve closed
7/7/2010	8:43:18 AM	SiCl4 post valve closed
7/7/2010	8:43:18 AM	Main Vac valve closed
7/7/2010	8:43:18 AM	Bypass valve closed
7/7/2010	8:43:18 AM	Bubbler valve closed
7/7/2010	8:43:18 AM	Helium MFC set to  0.000000
7/7/2010	8:43:18 AM	H2 MFC set to  0.000000
7/7/2010	8:43:18 AM	BCl3 MFC set to  0.000000
7/7/2010	8:43:18 AM	PHl3 MFC set to  0.000000
7/7/2010	8:43:18 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:43:18 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:43:18 AM	Tube furnace set to 0
7/7/2010	8:43:18 AM	Run finished at 8:43 AM
7/7/2010	8:43:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	8:45:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	8:45:35 AM	Recipe started at 8:45 AM
7/7/2010	8:45:35 AM	Helium valve closed
7/7/2010	8:45:35 AM	H2 valve closed
7/7/2010	8:45:35 AM	BCl3 valve closed
7/7/2010	8:45:35 AM	PH3 valve closed
7/7/2010	8:45:35 AM	SiCl4 pre valve closed
7/7/2010	8:45:35 AM	SiCl4 post valve closed
7/7/2010	8:45:35 AM	Main Vac valve closed
7/7/2010	8:45:35 AM	Bubbler valve closed
7/7/2010	8:45:35 AM	Bypass valve opened
7/7/2010	8:45:35 AM	Helium MFC set to  0.000000
7/7/2010	8:45:35 AM	H2 MFC set to  0.000000
7/7/2010	8:45:35 AM	BCl3 MFC set to  0.000000
7/7/2010	8:45:35 AM	PHl3 MFC set to  0.000000
7/7/2010	8:45:35 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:45:35 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:45:35 AM	Tube furnace set to 0
7/7/2010	8:46:21 AM	Helium valve closed
7/7/2010	8:46:21 AM	H2 valve closed
7/7/2010	8:46:21 AM	BCl3 valve closed
7/7/2010	8:46:21 AM	PH3 valve closed
7/7/2010	8:46:21 AM	SiCl4 pre valve closed
7/7/2010	8:46:21 AM	SiCl4 post valve closed
7/7/2010	8:46:21 AM	Bubbler valve closed
7/7/2010	8:46:21 AM	Main Vac valve opened
7/7/2010	8:46:21 AM	Bypass valve opened
7/7/2010	8:46:21 AM	Helium MFC set to  0.000000
7/7/2010	8:46:21 AM	H2 MFC set to  0.000000
7/7/2010	8:46:21 AM	BCl3 MFC set to  0.000000
7/7/2010	8:46:21 AM	PHl3 MFC set to  0.000000
7/7/2010	8:46:21 AM	SiCl4 MFC set to  0.000000
7/7/2010	8:46:21 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:46:21 AM	Tube furnace set to 0
7/7/2010	8:46:21 AM	Run finished at 8:46 AM
7/7/2010	8:46:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	8:46:32 AM	Helium MFC set to  75.000000
7/7/2010	8:46:33 AM	Helium valve opened
7/7/2010	9:00:32 AM	Helium valve closed
7/7/2010	9:01:22 AM	Helium valve opened
7/7/2010	9:01:27 AM	Helium MFC set to  100.000000
7/7/2010	9:03:41 AM	Helium valve closed
7/7/2010	9:04:44 AM	Helium valve opened
7/7/2010	9:17:08 AM	Helium valve closed
7/7/2010	9:18:45 AM	Recipe started at 9:18 AM
7/7/2010	9:18:45 AM	Helium valve closed
7/7/2010	9:18:45 AM	BCl3 valve closed
7/7/2010	9:18:45 AM	PH3 valve closed
7/7/2010	9:18:45 AM	SiCl4 pre valve closed
7/7/2010	9:18:45 AM	SiCl4 post valve closed
7/7/2010	9:18:45 AM	Main Vac valve closed
7/7/2010	9:18:45 AM	Bypass valve closed
7/7/2010	9:18:45 AM	Bubbler valve closed
7/7/2010	9:18:45 AM	H2 valve opened
7/7/2010	9:18:45 AM	Helium MFC set to  0.000000
7/7/2010	9:18:45 AM	H2 MFC set to  500.000000
7/7/2010	9:18:45 AM	BCl3 MFC set to  0.000000
7/7/2010	9:18:45 AM	PHl3 MFC set to  0.000000
7/7/2010	9:18:45 AM	SiCl4 MFC set to  0.000000
7/7/2010	9:18:45 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:18:45 AM	Tube furnace set to 0
7/7/2010	9:20:08 AM	Helium valve closed
7/7/2010	9:20:08 AM	BCl3 valve closed
7/7/2010	9:20:08 AM	PH3 valve closed
7/7/2010	9:20:08 AM	SiCl4 pre valve closed
7/7/2010	9:20:08 AM	SiCl4 post valve closed
7/7/2010	9:20:08 AM	Main Vac valve closed
7/7/2010	9:20:08 AM	Bypass valve closed
7/7/2010	9:20:08 AM	H2 valve opened
7/7/2010	9:20:08 AM	Bubbler valve opened
7/7/2010	9:20:08 AM	Helium MFC set to  0.000000
7/7/2010	9:20:08 AM	H2 MFC set to  500.000000
7/7/2010	9:20:08 AM	BCl3 MFC set to  0.000000
7/7/2010	9:20:08 AM	PHl3 MFC set to  0.000000
7/7/2010	9:20:08 AM	SiCl4 MFC set to  0.000000
7/7/2010	9:20:08 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:20:08 AM	Tube furnace set to 1000
7/7/2010	9:40:08 AM	Helium valve closed
7/7/2010	9:40:08 AM	BCl3 valve closed
7/7/2010	9:40:08 AM	PH3 valve closed
7/7/2010	9:40:08 AM	Main Vac valve closed
7/7/2010	9:40:08 AM	Bypass valve closed
7/7/2010	9:40:08 AM	H2 valve opened
7/7/2010	9:40:08 AM	SiCl4 pre valve opened
7/7/2010	9:40:08 AM	SiCl4 post valve opened
7/7/2010	9:40:08 AM	Bubbler valve opened
7/7/2010	9:40:08 AM	Helium MFC set to  0.000000
7/7/2010	9:40:08 AM	H2 MFC set to  500.000000
7/7/2010	9:40:08 AM	BCl3 MFC set to  0.000000
7/7/2010	9:40:08 AM	PHl3 MFC set to  0.000000
7/7/2010	9:40:08 AM	SiCl4 MFC set to  50.000000
7/7/2010	9:40:08 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:40:08 AM	Tube furnace set to 1000
7/7/2010	10:00:08 AM	H2 valve closed
7/7/2010	10:00:08 AM	BCl3 valve closed
7/7/2010	10:00:08 AM	PH3 valve closed
7/7/2010	10:00:08 AM	SiCl4 pre valve closed
7/7/2010	10:00:08 AM	SiCl4 post valve closed
7/7/2010	10:00:08 AM	Main Vac valve closed
7/7/2010	10:00:08 AM	Bypass valve closed
7/7/2010	10:00:08 AM	Helium valve opened
7/7/2010	10:00:08 AM	Bubbler valve opened
7/7/2010	10:00:08 AM	Helium MFC set to  500.000000
7/7/2010	10:00:08 AM	H2 MFC set to  0.000000
7/7/2010	10:00:08 AM	BCl3 MFC set to  0.000000
7/7/2010	10:00:08 AM	PHl3 MFC set to  0.000000
7/7/2010	10:00:08 AM	SiCl4 MFC set to  0.000000
7/7/2010	10:00:08 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	10:00:08 AM	Tube furnace set to 0
7/7/2010	10:25:52 AM	Helium valve closed
7/7/2010	10:25:52 AM	H2 valve closed
7/7/2010	10:25:52 AM	BCl3 valve closed
7/7/2010	10:25:52 AM	PH3 valve closed
7/7/2010	10:25:52 AM	SiCl4 pre valve closed
7/7/2010	10:25:52 AM	SiCl4 post valve closed
7/7/2010	10:25:52 AM	Main Vac valve closed
7/7/2010	10:25:52 AM	Bypass valve closed
7/7/2010	10:25:52 AM	Bubbler valve closed
7/7/2010	10:25:52 AM	Helium MFC set to  0.000000
7/7/2010	10:25:52 AM	H2 MFC set to  0.000000
7/7/2010	10:25:52 AM	BCl3 MFC set to  0.000000
7/7/2010	10:25:52 AM	PHl3 MFC set to  0.000000
7/7/2010	10:25:52 AM	SiCl4 MFC set to  0.000000
7/7/2010	10:25:52 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	10:25:53 AM	Tube furnace set to 0
7/7/2010	10:25:53 AM	Run finished at 10:25 AM
7/7/2010	10:29:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	10:29:39 AM	Recipe started at 10:29 AM
7/7/2010	10:29:39 AM	Helium valve closed
7/7/2010	10:29:39 AM	H2 valve closed
7/7/2010	10:29:39 AM	BCl3 valve closed
7/7/2010	10:29:39 AM	PH3 valve closed
7/7/2010	10:29:39 AM	SiCl4 pre valve closed
7/7/2010	10:29:40 AM	SiCl4 post valve closed
7/7/2010	10:29:40 AM	Main Vac valve closed
7/7/2010	10:29:40 AM	Bubbler valve closed
7/7/2010	10:29:40 AM	Bypass valve opened
7/7/2010	10:29:40 AM	Helium MFC set to  0.000000
7/7/2010	10:29:40 AM	H2 MFC set to  0.000000
7/7/2010	10:29:40 AM	BCl3 MFC set to  0.000000
7/7/2010	10:29:40 AM	PHl3 MFC set to  0.000000
7/7/2010	10:29:40 AM	SiCl4 MFC set to  0.000000
7/7/2010	10:29:40 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	10:29:40 AM	Tube furnace set to 0
7/7/2010	10:30:28 AM	Helium valve closed
7/7/2010	10:30:28 AM	H2 valve closed
7/7/2010	10:30:28 AM	BCl3 valve closed
7/7/2010	10:30:28 AM	PH3 valve closed
7/7/2010	10:30:28 AM	SiCl4 pre valve closed
7/7/2010	10:30:28 AM	SiCl4 post valve closed
7/7/2010	10:30:28 AM	Bubbler valve closed
7/7/2010	10:30:28 AM	Main Vac valve opened
7/7/2010	10:30:28 AM	Bypass valve opened
7/7/2010	10:30:28 AM	Helium MFC set to  0.000000
7/7/2010	10:30:28 AM	H2 MFC set to  0.000000
7/7/2010	10:30:28 AM	BCl3 MFC set to  0.000000
7/7/2010	10:30:28 AM	PHl3 MFC set to  0.000000
7/7/2010	10:30:28 AM	SiCl4 MFC set to  0.000000
7/7/2010	10:30:28 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	10:30:28 AM	Tube furnace set to 0
7/7/2010	10:30:29 AM	Run finished at 10:30 AM
7/7/2010	10:30:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	10:30:36 AM	Helium MFC set to  100.000000
7/7/2010	10:30:37 AM	Helium valve opened
7/7/2010	10:39:04 AM	Helium valve closed
7/7/2010	10:40:08 AM	Helium valve opened
7/7/2010	10:49:38 AM	Helium valve closed
7/7/2010	10:50:34 AM	Recipe started at 10:50 AM
7/7/2010	10:50:34 AM	Helium valve closed
7/7/2010	10:50:34 AM	BCl3 valve closed
7/7/2010	10:50:34 AM	PH3 valve closed
7/7/2010	10:50:34 AM	SiCl4 pre valve closed
7/7/2010	10:50:34 AM	SiCl4 post valve closed
7/7/2010	10:50:34 AM	Main Vac valve closed
7/7/2010	10:50:34 AM	Bypass valve closed
7/7/2010	10:50:34 AM	Bubbler valve closed
7/7/2010	10:50:34 AM	H2 valve opened
7/7/2010	10:50:34 AM	Helium MFC set to  0.000000
7/7/2010	10:50:34 AM	H2 MFC set to  500.000000
7/7/2010	10:50:34 AM	BCl3 MFC set to  0.000000
7/7/2010	10:50:34 AM	PHl3 MFC set to  0.000000
7/7/2010	10:50:34 AM	SiCl4 MFC set to  0.000000
7/7/2010	10:50:34 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	10:50:34 AM	Tube furnace set to 0
7/7/2010	10:51:56 AM	Helium valve closed
7/7/2010	10:51:56 AM	BCl3 valve closed
7/7/2010	10:51:56 AM	PH3 valve closed
7/7/2010	10:51:56 AM	SiCl4 pre valve closed
7/7/2010	10:51:56 AM	SiCl4 post valve closed
7/7/2010	10:51:56 AM	Main Vac valve closed
7/7/2010	10:51:56 AM	Bypass valve closed
7/7/2010	10:51:56 AM	H2 valve opened
7/7/2010	10:51:56 AM	Bubbler valve opened
7/7/2010	10:51:56 AM	Helium MFC set to  0.000000
7/7/2010	10:51:56 AM	H2 MFC set to  500.000000
7/7/2010	10:51:56 AM	BCl3 MFC set to  0.000000
7/7/2010	10:51:56 AM	PHl3 MFC set to  0.000000
7/7/2010	10:51:56 AM	SiCl4 MFC set to  0.000000
7/7/2010	10:51:56 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	10:51:56 AM	Tube furnace set to 1000
7/7/2010	11:11:56 AM	Helium valve closed
7/7/2010	11:11:56 AM	BCl3 valve closed
7/7/2010	11:11:56 AM	PH3 valve closed
7/7/2010	11:11:56 AM	Main Vac valve closed
7/7/2010	11:11:56 AM	Bypass valve closed
7/7/2010	11:11:56 AM	H2 valve opened
7/7/2010	11:11:56 AM	SiCl4 pre valve opened
7/7/2010	11:11:56 AM	SiCl4 post valve opened
7/7/2010	11:11:56 AM	Bubbler valve opened
7/7/2010	11:11:56 AM	Helium MFC set to  0.000000
7/7/2010	11:11:56 AM	H2 MFC set to  500.000000
7/7/2010	11:11:56 AM	BCl3 MFC set to  0.000000
7/7/2010	11:11:56 AM	PHl3 MFC set to  0.000000
7/7/2010	11:11:56 AM	SiCl4 MFC set to  50.000000
7/7/2010	11:11:56 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	11:11:56 AM	Tube furnace set to 1000
7/7/2010	11:31:56 AM	H2 valve closed
7/7/2010	11:31:56 AM	BCl3 valve closed
7/7/2010	11:31:56 AM	PH3 valve closed
7/7/2010	11:31:56 AM	SiCl4 pre valve closed
7/7/2010	11:31:56 AM	SiCl4 post valve closed
7/7/2010	11:31:56 AM	Main Vac valve closed
7/7/2010	11:31:56 AM	Bypass valve closed
7/7/2010	11:31:56 AM	Helium valve opened
7/7/2010	11:31:56 AM	Bubbler valve opened
7/7/2010	11:31:56 AM	Helium MFC set to  500.000000
7/7/2010	11:31:56 AM	H2 MFC set to  0.000000
7/7/2010	11:31:56 AM	BCl3 MFC set to  0.000000
7/7/2010	11:31:56 AM	PHl3 MFC set to  0.000000
7/7/2010	11:31:56 AM	SiCl4 MFC set to  0.000000
7/7/2010	11:31:56 AM	Bypass solenoid MFC set to  0.000000
7/7/2010	11:31:56 AM	Tube furnace set to 0
7/7/2010	12:04:22 PM	Run aborted at 12:04 PM
7/7/2010	12:04:22 PM	Helium valve closed
7/7/2010	12:04:22 PM	H2 valve closed
7/7/2010	12:04:22 PM	BCl3 valve closed
7/7/2010	12:04:22 PM	PH3 valve closed
7/7/2010	12:04:22 PM	SiCl4 pre valve closed
7/7/2010	12:04:22 PM	SiCl4 post valve closed
7/7/2010	12:04:22 PM	Bypass valve closed
7/7/2010	12:04:22 PM	Main Vac valve closed
7/7/2010	12:04:22 PM	Bubbler valve closed
7/7/2010	12:04:22 PM	Helium MFC set to  0.000000
7/7/2010	12:04:22 PM	H2 MFC set to  0.000000
7/7/2010	12:04:22 PM	BCl3 MFC set to  0.000000
7/7/2010	12:04:22 PM	PHl3 MFC set to  0.000000
7/7/2010	12:04:22 PM	SiCl4 MFC set to  0.000000
7/7/2010	12:04:23 PM	Tube furnace set to 0
7/7/2010	12:08:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	12:08:59 PM	Recipe started at 12:08 PM
7/7/2010	12:08:59 PM	Helium valve closed
7/7/2010	12:08:59 PM	H2 valve closed
7/7/2010	12:08:59 PM	BCl3 valve closed
7/7/2010	12:08:59 PM	PH3 valve closed
7/7/2010	12:08:59 PM	SiCl4 pre valve closed
7/7/2010	12:08:59 PM	SiCl4 post valve closed
7/7/2010	12:08:59 PM	Main Vac valve closed
7/7/2010	12:08:59 PM	Bubbler valve closed
7/7/2010	12:08:59 PM	Bypass valve opened
7/7/2010	12:08:59 PM	Helium MFC set to  0.000000
7/7/2010	12:08:59 PM	H2 MFC set to  0.000000
7/7/2010	12:08:59 PM	BCl3 MFC set to  0.000000
7/7/2010	12:08:59 PM	PHl3 MFC set to  0.000000
7/7/2010	12:08:59 PM	SiCl4 MFC set to  0.000000
7/7/2010	12:08:59 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	12:08:59 PM	Tube furnace set to 0
7/7/2010	12:09:48 PM	Helium valve closed
7/7/2010	12:09:48 PM	H2 valve closed
7/7/2010	12:09:49 PM	BCl3 valve closed
7/7/2010	12:09:49 PM	PH3 valve closed
7/7/2010	12:09:49 PM	SiCl4 pre valve closed
7/7/2010	12:09:49 PM	SiCl4 post valve closed
7/7/2010	12:09:49 PM	Bubbler valve closed
7/7/2010	12:09:49 PM	Main Vac valve opened
7/7/2010	12:09:49 PM	Bypass valve opened
7/7/2010	12:09:49 PM	Helium MFC set to  0.000000
7/7/2010	12:09:49 PM	H2 MFC set to  0.000000
7/7/2010	12:09:49 PM	BCl3 MFC set to  0.000000
7/7/2010	12:09:49 PM	PHl3 MFC set to  0.000000
7/7/2010	12:09:49 PM	SiCl4 MFC set to  0.000000
7/7/2010	12:09:49 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	12:09:49 PM	Tube furnace set to 0
7/7/2010	12:09:49 PM	Run finished at 12:09 PM
7/7/2010	12:09:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	12:09:59 PM	Helium MFC set to  100.000000
7/7/2010	12:09:59 PM	Helium valve opened
7/7/2010	12:30:41 PM	Helium valve closed
7/7/2010	12:31:51 PM	Recipe started at 12:31 PM
7/7/2010	12:31:51 PM	Helium valve closed
7/7/2010	12:31:51 PM	BCl3 valve closed
7/7/2010	12:31:51 PM	PH3 valve closed
7/7/2010	12:31:51 PM	SiCl4 pre valve closed
7/7/2010	12:31:51 PM	SiCl4 post valve closed
7/7/2010	12:31:51 PM	Main Vac valve closed
7/7/2010	12:31:51 PM	Bypass valve closed
7/7/2010	12:31:51 PM	Bubbler valve closed
7/7/2010	12:31:51 PM	H2 valve opened
7/7/2010	12:31:51 PM	Helium MFC set to  0.000000
7/7/2010	12:31:51 PM	H2 MFC set to  500.000000
7/7/2010	12:31:51 PM	BCl3 MFC set to  0.000000
7/7/2010	12:31:51 PM	PHl3 MFC set to  0.000000
7/7/2010	12:31:51 PM	SiCl4 MFC set to  0.000000
7/7/2010	12:31:51 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	12:31:52 PM	Tube furnace set to 0
7/7/2010	12:33:14 PM	Helium valve closed
7/7/2010	12:33:14 PM	BCl3 valve closed
7/7/2010	12:33:14 PM	PH3 valve closed
7/7/2010	12:33:14 PM	SiCl4 pre valve closed
7/7/2010	12:33:14 PM	SiCl4 post valve closed
7/7/2010	12:33:14 PM	Main Vac valve closed
7/7/2010	12:33:14 PM	Bypass valve closed
7/7/2010	12:33:14 PM	H2 valve opened
7/7/2010	12:33:14 PM	Bubbler valve opened
7/7/2010	12:33:14 PM	Helium MFC set to  0.000000
7/7/2010	12:33:14 PM	H2 MFC set to  500.000000
7/7/2010	12:33:14 PM	BCl3 MFC set to  0.000000
7/7/2010	12:33:14 PM	PHl3 MFC set to  0.000000
7/7/2010	12:33:14 PM	SiCl4 MFC set to  0.000000
7/7/2010	12:33:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	12:33:14 PM	Tube furnace set to 1000
7/7/2010	12:53:14 PM	Helium valve closed
7/7/2010	12:53:14 PM	BCl3 valve closed
7/7/2010	12:53:14 PM	PH3 valve closed
7/7/2010	12:53:14 PM	Main Vac valve closed
7/7/2010	12:53:14 PM	Bypass valve closed
7/7/2010	12:53:14 PM	H2 valve opened
7/7/2010	12:53:14 PM	SiCl4 pre valve opened
7/7/2010	12:53:14 PM	SiCl4 post valve opened
7/7/2010	12:53:14 PM	Bubbler valve opened
7/7/2010	12:53:14 PM	Helium MFC set to  0.000000
7/7/2010	12:53:14 PM	H2 MFC set to  500.000000
7/7/2010	12:53:14 PM	BCl3 MFC set to  0.000000
7/7/2010	12:53:14 PM	PHl3 MFC set to  0.000000
7/7/2010	12:53:14 PM	SiCl4 MFC set to  50.000000
7/7/2010	12:53:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	12:53:14 PM	Tube furnace set to 1000
7/7/2010	1:13:14 PM	H2 valve closed
7/7/2010	1:13:14 PM	BCl3 valve closed
7/7/2010	1:13:14 PM	PH3 valve closed
7/7/2010	1:13:14 PM	SiCl4 pre valve closed
7/7/2010	1:13:14 PM	SiCl4 post valve closed
7/7/2010	1:13:14 PM	Main Vac valve closed
7/7/2010	1:13:14 PM	Bypass valve closed
7/7/2010	1:13:14 PM	Helium valve opened
7/7/2010	1:13:14 PM	Bubbler valve opened
7/7/2010	1:13:14 PM	Helium MFC set to  500.000000
7/7/2010	1:13:14 PM	H2 MFC set to  0.000000
7/7/2010	1:13:14 PM	BCl3 MFC set to  0.000000
7/7/2010	1:13:14 PM	PHl3 MFC set to  0.000000
7/7/2010	1:13:14 PM	SiCl4 MFC set to  0.000000
7/7/2010	1:13:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	1:13:14 PM	Tube furnace set to 0
7/7/2010	1:53:14 PM	Helium valve closed
7/7/2010	1:53:14 PM	H2 valve closed
7/7/2010	1:53:14 PM	BCl3 valve closed
7/7/2010	1:53:14 PM	PH3 valve closed
7/7/2010	1:53:14 PM	SiCl4 pre valve closed
7/7/2010	1:53:14 PM	SiCl4 post valve closed
7/7/2010	1:53:14 PM	Main Vac valve closed
7/7/2010	1:53:14 PM	Bypass valve closed
7/7/2010	1:53:14 PM	Bubbler valve closed
7/7/2010	1:53:14 PM	Helium MFC set to  0.000000
7/7/2010	1:53:14 PM	H2 MFC set to  0.000000
7/7/2010	1:53:14 PM	BCl3 MFC set to  0.000000
7/7/2010	1:53:14 PM	PHl3 MFC set to  0.000000
7/7/2010	1:53:14 PM	SiCl4 MFC set to  0.000000
7/7/2010	1:53:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	1:53:15 PM	Tube furnace set to 0
7/7/2010	1:53:15 PM	Run finished at 1:53 PM
7/7/2010	2:03:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	2:03:09 PM	Recipe started at 2:03 PM
7/7/2010	2:03:09 PM	Helium valve closed
7/7/2010	2:03:09 PM	H2 valve closed
7/7/2010	2:03:09 PM	BCl3 valve closed
7/7/2010	2:03:09 PM	PH3 valve closed
7/7/2010	2:03:09 PM	SiCl4 pre valve closed
7/7/2010	2:03:09 PM	SiCl4 post valve closed
7/7/2010	2:03:09 PM	Main Vac valve closed
7/7/2010	2:03:09 PM	Bubbler valve closed
7/7/2010	2:03:09 PM	Bypass valve opened
7/7/2010	2:03:09 PM	Helium MFC set to  0.000000
7/7/2010	2:03:09 PM	H2 MFC set to  0.000000
7/7/2010	2:03:09 PM	BCl3 MFC set to  0.000000
7/7/2010	2:03:09 PM	PHl3 MFC set to  0.000000
7/7/2010	2:03:09 PM	SiCl4 MFC set to  0.000000
7/7/2010	2:03:09 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	2:03:09 PM	Tube furnace set to 0
7/7/2010	2:03:58 PM	Helium valve closed
7/7/2010	2:03:58 PM	H2 valve closed
7/7/2010	2:03:58 PM	BCl3 valve closed
7/7/2010	2:03:58 PM	PH3 valve closed
7/7/2010	2:03:58 PM	SiCl4 pre valve closed
7/7/2010	2:03:58 PM	SiCl4 post valve closed
7/7/2010	2:03:58 PM	Bubbler valve closed
7/7/2010	2:03:58 PM	Main Vac valve opened
7/7/2010	2:03:58 PM	Bypass valve opened
7/7/2010	2:03:58 PM	Helium MFC set to  0.000000
7/7/2010	2:03:58 PM	H2 MFC set to  0.000000
7/7/2010	2:03:58 PM	BCl3 MFC set to  0.000000
7/7/2010	2:03:58 PM	PHl3 MFC set to  0.000000
7/7/2010	2:03:58 PM	SiCl4 MFC set to  0.000000
7/7/2010	2:03:58 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	2:03:58 PM	Tube furnace set to 0
7/7/2010	2:03:58 PM	Run finished at 2:03 PM
7/7/2010	2:03:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	2:15:45 PM	Helium MFC set to  100.000000
7/7/2010	2:15:45 PM	Helium valve opened
7/7/2010	2:16:29 PM	Helium valve closed
7/7/2010	2:17:03 PM	Helium valve opened
7/7/2010	2:26:24 PM	Helium valve closed
7/7/2010	2:27:07 PM	Recipe started at 2:27 PM
7/7/2010	2:27:07 PM	Helium valve closed
7/7/2010	2:27:07 PM	BCl3 valve closed
7/7/2010	2:27:07 PM	PH3 valve closed
7/7/2010	2:27:07 PM	SiCl4 pre valve closed
7/7/2010	2:27:07 PM	SiCl4 post valve closed
7/7/2010	2:27:07 PM	Main Vac valve closed
7/7/2010	2:27:07 PM	Bypass valve closed
7/7/2010	2:27:07 PM	Bubbler valve closed
7/7/2010	2:27:07 PM	H2 valve opened
7/7/2010	2:27:07 PM	Helium MFC set to  0.000000
7/7/2010	2:27:07 PM	H2 MFC set to  500.000000
7/7/2010	2:27:07 PM	BCl3 MFC set to  0.000000
7/7/2010	2:27:07 PM	PHl3 MFC set to  0.000000
7/7/2010	2:27:07 PM	SiCl4 MFC set to  0.000000
7/7/2010	2:27:07 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	2:27:07 PM	Tube furnace set to 0
7/7/2010	2:28:30 PM	Helium valve closed
7/7/2010	2:28:30 PM	BCl3 valve closed
7/7/2010	2:28:30 PM	PH3 valve closed
7/7/2010	2:28:30 PM	SiCl4 pre valve closed
7/7/2010	2:28:30 PM	SiCl4 post valve closed
7/7/2010	2:28:30 PM	Main Vac valve closed
7/7/2010	2:28:30 PM	Bypass valve closed
7/7/2010	2:28:30 PM	H2 valve opened
7/7/2010	2:28:30 PM	Bubbler valve opened
7/7/2010	2:28:30 PM	Helium MFC set to  0.000000
7/7/2010	2:28:30 PM	H2 MFC set to  500.000000
7/7/2010	2:28:30 PM	BCl3 MFC set to  0.000000
7/7/2010	2:28:30 PM	PHl3 MFC set to  0.000000
7/7/2010	2:28:30 PM	SiCl4 MFC set to  0.000000
7/7/2010	2:28:30 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	2:28:30 PM	Tube furnace set to 1000
7/7/2010	2:48:30 PM	Helium valve closed
7/7/2010	2:48:30 PM	BCl3 valve closed
7/7/2010	2:48:30 PM	PH3 valve closed
7/7/2010	2:48:30 PM	Main Vac valve closed
7/7/2010	2:48:30 PM	Bypass valve closed
7/7/2010	2:48:30 PM	H2 valve opened
7/7/2010	2:48:30 PM	SiCl4 pre valve opened
7/7/2010	2:48:30 PM	SiCl4 post valve opened
7/7/2010	2:48:30 PM	Bubbler valve opened
7/7/2010	2:48:30 PM	Helium MFC set to  0.000000
7/7/2010	2:48:30 PM	H2 MFC set to  500.000000
7/7/2010	2:48:30 PM	BCl3 MFC set to  0.000000
7/7/2010	2:48:30 PM	PHl3 MFC set to  0.000000
7/7/2010	2:48:30 PM	SiCl4 MFC set to  50.000000
7/7/2010	2:48:30 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	2:48:30 PM	Tube furnace set to 1000
7/7/2010	3:08:30 PM	H2 valve closed
7/7/2010	3:08:30 PM	BCl3 valve closed
7/7/2010	3:08:30 PM	PH3 valve closed
7/7/2010	3:08:30 PM	SiCl4 pre valve closed
7/7/2010	3:08:30 PM	SiCl4 post valve closed
7/7/2010	3:08:30 PM	Main Vac valve closed
7/7/2010	3:08:30 PM	Bypass valve closed
7/7/2010	3:08:30 PM	Helium valve opened
7/7/2010	3:08:30 PM	Bubbler valve opened
7/7/2010	3:08:30 PM	Helium MFC set to  500.000000
7/7/2010	3:08:30 PM	H2 MFC set to  0.000000
7/7/2010	3:08:30 PM	BCl3 MFC set to  0.000000
7/7/2010	3:08:30 PM	PHl3 MFC set to  0.000000
7/7/2010	3:08:30 PM	SiCl4 MFC set to  0.000000
7/7/2010	3:08:30 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	3:08:30 PM	Tube furnace set to 0
7/7/2010	3:37:27 PM	Run aborted at 3:37 PM
7/7/2010	3:37:27 PM	Helium valve closed
7/7/2010	3:37:27 PM	H2 valve closed
7/7/2010	3:37:27 PM	BCl3 valve closed
7/7/2010	3:37:27 PM	PH3 valve closed
7/7/2010	3:37:27 PM	SiCl4 pre valve closed
7/7/2010	3:37:27 PM	SiCl4 post valve closed
7/7/2010	3:37:27 PM	Bypass valve closed
7/7/2010	3:37:27 PM	Main Vac valve closed
7/7/2010	3:37:27 PM	Bubbler valve closed
7/7/2010	3:37:27 PM	Helium MFC set to  0.000000
7/7/2010	3:37:27 PM	H2 MFC set to  0.000000
7/7/2010	3:37:27 PM	BCl3 MFC set to  0.000000
7/7/2010	3:37:27 PM	PHl3 MFC set to  0.000000
7/7/2010	3:37:27 PM	SiCl4 MFC set to  0.000000
7/7/2010	3:37:27 PM	Tube furnace set to 0
7/7/2010	3:40:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	3:40:44 PM	Recipe started at 3:40 PM
7/7/2010	3:40:44 PM	Helium valve closed
7/7/2010	3:40:44 PM	H2 valve closed
7/7/2010	3:40:44 PM	BCl3 valve closed
7/7/2010	3:40:44 PM	PH3 valve closed
7/7/2010	3:40:44 PM	SiCl4 pre valve closed
7/7/2010	3:40:44 PM	SiCl4 post valve closed
7/7/2010	3:40:44 PM	Main Vac valve closed
7/7/2010	3:40:44 PM	Bubbler valve closed
7/7/2010	3:40:44 PM	Bypass valve opened
7/7/2010	3:40:44 PM	Helium MFC set to  0.000000
7/7/2010	3:40:44 PM	H2 MFC set to  0.000000
7/7/2010	3:40:44 PM	BCl3 MFC set to  0.000000
7/7/2010	3:40:44 PM	PHl3 MFC set to  0.000000
7/7/2010	3:40:44 PM	SiCl4 MFC set to  0.000000
7/7/2010	3:40:44 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	3:40:44 PM	Tube furnace set to 0
7/7/2010	3:41:32 PM	Helium valve closed
7/7/2010	3:41:32 PM	H2 valve closed
7/7/2010	3:41:32 PM	BCl3 valve closed
7/7/2010	3:41:32 PM	PH3 valve closed
7/7/2010	3:41:32 PM	SiCl4 pre valve closed
7/7/2010	3:41:32 PM	SiCl4 post valve closed
7/7/2010	3:41:32 PM	Bubbler valve closed
7/7/2010	3:41:32 PM	Main Vac valve opened
7/7/2010	3:41:32 PM	Bypass valve opened
7/7/2010	3:41:32 PM	Helium MFC set to  0.000000
7/7/2010	3:41:32 PM	H2 MFC set to  0.000000
7/7/2010	3:41:32 PM	BCl3 MFC set to  0.000000
7/7/2010	3:41:32 PM	PHl3 MFC set to  0.000000
7/7/2010	3:41:32 PM	SiCl4 MFC set to  0.000000
7/7/2010	3:41:32 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	3:41:32 PM	Tube furnace set to 0
7/7/2010	3:41:33 PM	Run finished at 3:41 PM
7/7/2010	3:41:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	3:41:44 PM	Helium MFC set to  100.000000
7/7/2010	3:41:44 PM	Helium valve opened
7/7/2010	4:01:16 PM	Helium valve closed
7/7/2010	4:02:18 PM	Recipe started at 4:02 PM
7/7/2010	4:02:18 PM	Helium valve closed
7/7/2010	4:02:18 PM	BCl3 valve closed
7/7/2010	4:02:18 PM	PH3 valve closed
7/7/2010	4:02:18 PM	SiCl4 pre valve closed
7/7/2010	4:02:18 PM	SiCl4 post valve closed
7/7/2010	4:02:18 PM	Main Vac valve closed
7/7/2010	4:02:18 PM	Bypass valve closed
7/7/2010	4:02:18 PM	Bubbler valve closed
7/7/2010	4:02:18 PM	H2 valve opened
7/7/2010	4:02:18 PM	Helium MFC set to  0.000000
7/7/2010	4:02:18 PM	H2 MFC set to  500.000000
7/7/2010	4:02:18 PM	BCl3 MFC set to  0.000000
7/7/2010	4:02:18 PM	PHl3 MFC set to  0.000000
7/7/2010	4:02:18 PM	SiCl4 MFC set to  0.000000
7/7/2010	4:02:18 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	4:02:18 PM	Tube furnace set to 0
7/7/2010	4:03:39 PM	Helium valve closed
7/7/2010	4:03:39 PM	BCl3 valve closed
7/7/2010	4:03:39 PM	PH3 valve closed
7/7/2010	4:03:39 PM	SiCl4 pre valve closed
7/7/2010	4:03:39 PM	SiCl4 post valve closed
7/7/2010	4:03:39 PM	Main Vac valve closed
7/7/2010	4:03:39 PM	Bypass valve closed
7/7/2010	4:03:39 PM	H2 valve opened
7/7/2010	4:03:39 PM	Bubbler valve opened
7/7/2010	4:03:39 PM	Helium MFC set to  0.000000
7/7/2010	4:03:39 PM	H2 MFC set to  500.000000
7/7/2010	4:03:39 PM	BCl3 MFC set to  0.000000
7/7/2010	4:03:39 PM	PHl3 MFC set to  0.000000
7/7/2010	4:03:39 PM	SiCl4 MFC set to  0.000000
7/7/2010	4:03:39 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	4:03:39 PM	Tube furnace set to 1000
7/7/2010	4:23:39 PM	Helium valve closed
7/7/2010	4:23:39 PM	BCl3 valve closed
7/7/2010	4:23:39 PM	PH3 valve closed
7/7/2010	4:23:39 PM	Main Vac valve closed
7/7/2010	4:23:39 PM	Bypass valve closed
7/7/2010	4:23:39 PM	H2 valve opened
7/7/2010	4:23:39 PM	SiCl4 pre valve opened
7/7/2010	4:23:39 PM	SiCl4 post valve opened
7/7/2010	4:23:39 PM	Bubbler valve opened
7/7/2010	4:23:39 PM	Helium MFC set to  0.000000
7/7/2010	4:23:39 PM	H2 MFC set to  500.000000
7/7/2010	4:23:39 PM	BCl3 MFC set to  0.000000
7/7/2010	4:23:39 PM	PHl3 MFC set to  0.000000
7/7/2010	4:23:39 PM	SiCl4 MFC set to  50.000000
7/7/2010	4:23:39 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	4:23:40 PM	Tube furnace set to 1000
7/7/2010	4:43:40 PM	H2 valve closed
7/7/2010	4:43:40 PM	BCl3 valve closed
7/7/2010	4:43:40 PM	PH3 valve closed
7/7/2010	4:43:40 PM	SiCl4 pre valve closed
7/7/2010	4:43:40 PM	SiCl4 post valve closed
7/7/2010	4:43:40 PM	Main Vac valve closed
7/7/2010	4:43:40 PM	Bypass valve closed
7/7/2010	4:43:40 PM	Helium valve opened
7/7/2010	4:43:40 PM	Bubbler valve opened
7/7/2010	4:43:40 PM	Helium MFC set to  500.000000
7/7/2010	4:43:40 PM	H2 MFC set to  0.000000
7/7/2010	4:43:40 PM	BCl3 MFC set to  0.000000
7/7/2010	4:43:40 PM	PHl3 MFC set to  0.000000
7/7/2010	4:43:40 PM	SiCl4 MFC set to  0.000000
7/7/2010	4:43:40 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	4:43:40 PM	Tube furnace set to 0
7/7/2010	5:17:34 PM	Run aborted at 5:17 PM
7/7/2010	5:17:34 PM	Helium valve closed
7/7/2010	5:17:34 PM	H2 valve closed
7/7/2010	5:17:34 PM	BCl3 valve closed
7/7/2010	5:17:34 PM	PH3 valve closed
7/7/2010	5:17:34 PM	SiCl4 pre valve closed
7/7/2010	5:17:34 PM	SiCl4 post valve closed
7/7/2010	5:17:34 PM	Bypass valve closed
7/7/2010	5:17:34 PM	Main Vac valve closed
7/7/2010	5:17:34 PM	Bubbler valve closed
7/7/2010	5:17:34 PM	Helium MFC set to  0.000000
7/7/2010	5:17:34 PM	H2 MFC set to  0.000000
7/7/2010	5:17:34 PM	BCl3 MFC set to  0.000000
7/7/2010	5:17:34 PM	PHl3 MFC set to  0.000000
7/7/2010	5:17:34 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:17:35 PM	Tube furnace set to 0
7/7/2010	5:29:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	5:29:59 PM	Recipe started at 5:29 PM
7/7/2010	5:29:59 PM	Helium valve closed
7/7/2010	5:29:59 PM	H2 valve closed
7/7/2010	5:29:59 PM	BCl3 valve closed
7/7/2010	5:29:59 PM	PH3 valve closed
7/7/2010	5:29:59 PM	SiCl4 pre valve closed
7/7/2010	5:29:59 PM	SiCl4 post valve closed
7/7/2010	5:29:59 PM	Main Vac valve closed
7/7/2010	5:29:59 PM	Bubbler valve closed
7/7/2010	5:29:59 PM	Bypass valve opened
7/7/2010	5:29:59 PM	Helium MFC set to  0.000000
7/7/2010	5:29:59 PM	H2 MFC set to  0.000000
7/7/2010	5:29:59 PM	BCl3 MFC set to  0.000000
7/7/2010	5:29:59 PM	PHl3 MFC set to  0.000000
7/7/2010	5:29:59 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:29:59 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	5:30:00 PM	Tube furnace set to 0
7/7/2010	5:30:50 PM	Helium valve closed
7/7/2010	5:30:50 PM	H2 valve closed
7/7/2010	5:30:50 PM	BCl3 valve closed
7/7/2010	5:30:50 PM	PH3 valve closed
7/7/2010	5:30:50 PM	SiCl4 pre valve closed
7/7/2010	5:30:50 PM	SiCl4 post valve closed
7/7/2010	5:30:50 PM	Bubbler valve closed
7/7/2010	5:30:50 PM	Main Vac valve opened
7/7/2010	5:30:50 PM	Bypass valve opened
7/7/2010	5:30:50 PM	Helium MFC set to  0.000000
7/7/2010	5:30:50 PM	H2 MFC set to  0.000000
7/7/2010	5:30:50 PM	BCl3 MFC set to  0.000000
7/7/2010	5:30:50 PM	PHl3 MFC set to  0.000000
7/7/2010	5:30:50 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:30:50 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	5:30:50 PM	Tube furnace set to 0
7/7/2010	5:30:50 PM	Run finished at 5:30 PM
7/7/2010	5:30:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	5:33:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	5:33:58 PM	Recipe started at 5:33 PM
7/7/2010	5:33:58 PM	H2 valve closed
7/7/2010	5:33:58 PM	BCl3 valve closed
7/7/2010	5:33:58 PM	PH3 valve closed
7/7/2010	5:33:58 PM	SiCl4 pre valve closed
7/7/2010	5:33:58 PM	SiCl4 post valve closed
7/7/2010	5:33:58 PM	Main Vac valve closed
7/7/2010	5:33:58 PM	Bypass valve closed
7/7/2010	5:33:58 PM	Bubbler valve closed
7/7/2010	5:33:58 PM	Helium valve opened
7/7/2010	5:33:58 PM	Helium MFC set to  500.000000
7/7/2010	5:33:58 PM	H2 MFC set to  0.000000
7/7/2010	5:33:58 PM	BCl3 MFC set to  0.000000
7/7/2010	5:33:58 PM	PHl3 MFC set to  0.000000
7/7/2010	5:33:58 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:33:58 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	5:33:58 PM	Tube furnace set to 0
7/7/2010	5:35:17 PM	Helium valve closed
7/7/2010	5:35:17 PM	H2 valve closed
7/7/2010	5:35:17 PM	BCl3 valve closed
7/7/2010	5:35:17 PM	PH3 valve closed
7/7/2010	5:35:17 PM	SiCl4 pre valve closed
7/7/2010	5:35:17 PM	SiCl4 post valve closed
7/7/2010	5:35:17 PM	Main Vac valve closed
7/7/2010	5:35:17 PM	Bypass valve closed
7/7/2010	5:35:17 PM	Bubbler valve closed
7/7/2010	5:35:17 PM	Helium MFC set to  0.000000
7/7/2010	5:35:17 PM	H2 MFC set to  0.000000
7/7/2010	5:35:17 PM	BCl3 MFC set to  0.000000
7/7/2010	5:35:17 PM	PHl3 MFC set to  0.000000
7/7/2010	5:35:17 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:35:17 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	5:35:18 PM	Tube furnace set to 0
7/7/2010	5:35:18 PM	Run finished at 5:35 PM
7/7/2010	5:35:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	5:38:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	5:38:45 PM	Recipe started at 5:38 PM
7/7/2010	5:38:45 PM	Helium valve closed
7/7/2010	5:38:45 PM	H2 valve closed
7/7/2010	5:38:45 PM	BCl3 valve closed
7/7/2010	5:38:45 PM	PH3 valve closed
7/7/2010	5:38:45 PM	SiCl4 pre valve closed
7/7/2010	5:38:45 PM	SiCl4 post valve closed
7/7/2010	5:38:45 PM	Main Vac valve closed
7/7/2010	5:38:45 PM	Bubbler valve closed
7/7/2010	5:38:45 PM	Bypass valve opened
7/7/2010	5:38:45 PM	Helium MFC set to  0.000000
7/7/2010	5:38:45 PM	H2 MFC set to  0.000000
7/7/2010	5:38:45 PM	BCl3 MFC set to  0.000000
7/7/2010	5:38:45 PM	PHl3 MFC set to  0.000000
7/7/2010	5:38:45 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:38:45 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	5:38:45 PM	Tube furnace set to 0
7/7/2010	5:39:32 PM	Helium valve closed
7/7/2010	5:39:32 PM	H2 valve closed
7/7/2010	5:39:32 PM	BCl3 valve closed
7/7/2010	5:39:32 PM	PH3 valve closed
7/7/2010	5:39:32 PM	SiCl4 pre valve closed
7/7/2010	5:39:32 PM	SiCl4 post valve closed
7/7/2010	5:39:32 PM	Bubbler valve closed
7/7/2010	5:39:32 PM	Main Vac valve opened
7/7/2010	5:39:32 PM	Bypass valve opened
7/7/2010	5:39:32 PM	Helium MFC set to  0.000000
7/7/2010	5:39:32 PM	H2 MFC set to  0.000000
7/7/2010	5:39:32 PM	BCl3 MFC set to  0.000000
7/7/2010	5:39:32 PM	PHl3 MFC set to  0.000000
7/7/2010	5:39:32 PM	SiCl4 MFC set to  0.000000
7/7/2010	5:39:32 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	5:39:33 PM	Tube furnace set to 0
7/7/2010	5:39:33 PM	Run finished at 5:39 PM
7/7/2010	5:39:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	5:40:35 PM	Helium MFC set to  100.000000
7/7/2010	5:40:36 PM	Helium valve opened
7/7/2010	6:12:36 PM	Helium valve closed
7/7/2010	8:01:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	8:01:40 PM	Recipe started at 8:01 PM
7/7/2010	8:01:40 PM	H2 valve closed
7/7/2010	8:01:40 PM	BCl3 valve closed
7/7/2010	8:01:40 PM	PH3 valve closed
7/7/2010	8:01:40 PM	SiCl4 pre valve closed
7/7/2010	8:01:40 PM	SiCl4 post valve closed
7/7/2010	8:01:40 PM	Main Vac valve closed
7/7/2010	8:01:40 PM	Bypass valve closed
7/7/2010	8:01:40 PM	Bubbler valve closed
7/7/2010	8:01:40 PM	Helium valve opened
7/7/2010	8:01:40 PM	Helium MFC set to  500.000000
7/7/2010	8:01:40 PM	H2 MFC set to  0.000000
7/7/2010	8:01:40 PM	BCl3 MFC set to  0.000000
7/7/2010	8:01:40 PM	PHl3 MFC set to  0.000000
7/7/2010	8:01:40 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:01:40 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:01:40 PM	Tube furnace set to 0
7/7/2010	8:03:00 PM	Helium valve closed
7/7/2010	8:03:00 PM	H2 valve closed
7/7/2010	8:03:00 PM	BCl3 valve closed
7/7/2010	8:03:00 PM	PH3 valve closed
7/7/2010	8:03:00 PM	SiCl4 pre valve closed
7/7/2010	8:03:00 PM	SiCl4 post valve closed
7/7/2010	8:03:00 PM	Main Vac valve closed
7/7/2010	8:03:00 PM	Bypass valve closed
7/7/2010	8:03:00 PM	Bubbler valve closed
7/7/2010	8:03:00 PM	Helium MFC set to  0.000000
7/7/2010	8:03:00 PM	H2 MFC set to  0.000000
7/7/2010	8:03:00 PM	BCl3 MFC set to  0.000000
7/7/2010	8:03:00 PM	PHl3 MFC set to  0.000000
7/7/2010	8:03:00 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:03:00 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:03:00 PM	Tube furnace set to 0
7/7/2010	8:03:01 PM	Run finished at 8:03 PM
7/7/2010	8:03:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	8:09:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	8:09:09 PM	Recipe started at 8:09 PM
7/7/2010	8:09:09 PM	Helium valve closed
7/7/2010	8:09:09 PM	H2 valve closed
7/7/2010	8:09:09 PM	BCl3 valve closed
7/7/2010	8:09:09 PM	PH3 valve closed
7/7/2010	8:09:09 PM	SiCl4 pre valve closed
7/7/2010	8:09:09 PM	SiCl4 post valve closed
7/7/2010	8:09:09 PM	Main Vac valve closed
7/7/2010	8:09:09 PM	Bubbler valve closed
7/7/2010	8:09:09 PM	Bypass valve opened
7/7/2010	8:09:09 PM	Helium MFC set to  0.000000
7/7/2010	8:09:09 PM	H2 MFC set to  0.000000
7/7/2010	8:09:09 PM	BCl3 MFC set to  0.000000
7/7/2010	8:09:09 PM	PHl3 MFC set to  0.000000
7/7/2010	8:09:09 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:09:09 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:09:09 PM	Tube furnace set to 0
7/7/2010	8:09:57 PM	Helium valve closed
7/7/2010	8:09:57 PM	H2 valve closed
7/7/2010	8:09:57 PM	BCl3 valve closed
7/7/2010	8:09:57 PM	PH3 valve closed
7/7/2010	8:09:57 PM	SiCl4 pre valve closed
7/7/2010	8:09:57 PM	SiCl4 post valve closed
7/7/2010	8:09:57 PM	Bubbler valve closed
7/7/2010	8:09:57 PM	Main Vac valve opened
7/7/2010	8:09:57 PM	Bypass valve opened
7/7/2010	8:09:57 PM	Helium MFC set to  0.000000
7/7/2010	8:09:57 PM	H2 MFC set to  0.000000
7/7/2010	8:09:57 PM	BCl3 MFC set to  0.000000
7/7/2010	8:09:57 PM	PHl3 MFC set to  0.000000
7/7/2010	8:09:57 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:09:57 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:09:57 PM	Tube furnace set to 0
7/7/2010	8:09:57 PM	Run finished at 8:09 PM
7/7/2010	8:09:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	8:10:01 PM	Tube furnace set to 100
7/7/2010	8:16:14 PM	Helium valve opened
7/7/2010	8:16:17 PM	Helium MFC set to  100.000000
7/7/2010	8:34:33 PM	Helium valve closed
7/7/2010	8:34:36 PM	Helium MFC set to  0.000000
7/7/2010	8:35:35 PM	Bypass valve closed
7/7/2010	8:35:35 PM	Main Vac valve closed
7/7/2010	8:35:41 PM	Bypass valve opened
7/7/2010	8:35:42 PM	Main Vac valve opened
7/7/2010	8:35:48 PM	Tube furnace set to 0
7/7/2010	8:35:52 PM	Recipe started at 8:35 PM
7/7/2010	8:35:52 PM	Helium valve closed
7/7/2010	8:35:52 PM	BCl3 valve closed
7/7/2010	8:35:52 PM	PH3 valve closed
7/7/2010	8:35:52 PM	SiCl4 pre valve closed
7/7/2010	8:35:52 PM	SiCl4 post valve closed
7/7/2010	8:35:52 PM	Main Vac valve closed
7/7/2010	8:35:52 PM	Bypass valve closed
7/7/2010	8:35:52 PM	Bubbler valve closed
7/7/2010	8:35:52 PM	H2 valve opened
7/7/2010	8:35:52 PM	Helium MFC set to  0.000000
7/7/2010	8:35:52 PM	H2 MFC set to  500.000000
7/7/2010	8:35:52 PM	BCl3 MFC set to  0.000000
7/7/2010	8:35:52 PM	PHl3 MFC set to  0.000000
7/7/2010	8:35:52 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:35:52 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:35:52 PM	Tube furnace set to 0
7/7/2010	8:37:13 PM	Helium valve closed
7/7/2010	8:37:13 PM	BCl3 valve closed
7/7/2010	8:37:13 PM	PH3 valve closed
7/7/2010	8:37:13 PM	SiCl4 pre valve closed
7/7/2010	8:37:13 PM	SiCl4 post valve closed
7/7/2010	8:37:13 PM	Main Vac valve closed
7/7/2010	8:37:13 PM	Bypass valve closed
7/7/2010	8:37:13 PM	H2 valve opened
7/7/2010	8:37:13 PM	Bubbler valve opened
7/7/2010	8:37:13 PM	Helium MFC set to  0.000000
7/7/2010	8:37:13 PM	H2 MFC set to  500.000000
7/7/2010	8:37:13 PM	BCl3 MFC set to  0.000000
7/7/2010	8:37:13 PM	PHl3 MFC set to  0.000000
7/7/2010	8:37:13 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:37:13 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:37:13 PM	Tube furnace set to 1000
7/7/2010	8:45:57 PM	Helium valve closed
7/7/2010	8:45:57 PM	BCl3 valve closed
7/7/2010	8:45:57 PM	PH3 valve closed
7/7/2010	8:45:57 PM	SiCl4 pre valve closed
7/7/2010	8:45:57 PM	SiCl4 post valve closed
7/7/2010	8:45:57 PM	Main Vac valve closed
7/7/2010	8:45:57 PM	Bypass valve closed
7/7/2010	8:45:57 PM	H2 valve opened
7/7/2010	8:45:57 PM	Bubbler valve opened
7/7/2010	8:45:57 PM	Helium MFC set to  0.000000
7/7/2010	8:45:57 PM	H2 MFC set to  500.000000
7/7/2010	8:45:57 PM	BCl3 MFC set to  15.000000
7/7/2010	8:45:57 PM	PHl3 MFC set to  0.000000
7/7/2010	8:45:57 PM	SiCl4 MFC set to  50.000000
7/7/2010	8:45:57 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:45:58 PM	Tube furnace set to 1000
7/7/2010	8:49:14 PM	Helium valve closed
7/7/2010	8:49:14 PM	BCl3 valve closed
7/7/2010	8:49:14 PM	PH3 valve closed
7/7/2010	8:49:14 PM	SiCl4 pre valve closed
7/7/2010	8:49:14 PM	SiCl4 post valve closed
7/7/2010	8:49:14 PM	Main Vac valve closed
7/7/2010	8:49:14 PM	Bypass valve closed
7/7/2010	8:49:14 PM	H2 valve opened
7/7/2010	8:49:14 PM	Bubbler valve opened
7/7/2010	8:49:14 PM	Helium MFC set to  0.000000
7/7/2010	8:49:14 PM	H2 MFC set to  500.000000
7/7/2010	8:49:14 PM	BCl3 MFC set to  15.000000
7/7/2010	8:49:14 PM	PHl3 MFC set to  0.000000
7/7/2010	8:49:14 PM	SiCl4 MFC set to  50.000000
7/7/2010	8:49:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:49:14 PM	Tube furnace set to 1000
7/7/2010	8:54:14 PM	H2 valve closed
7/7/2010	8:54:14 PM	BCl3 valve closed
7/7/2010	8:54:14 PM	PH3 valve closed
7/7/2010	8:54:14 PM	SiCl4 pre valve closed
7/7/2010	8:54:14 PM	SiCl4 post valve closed
7/7/2010	8:54:14 PM	Main Vac valve closed
7/7/2010	8:54:14 PM	Bypass valve closed
7/7/2010	8:54:14 PM	Helium valve opened
7/7/2010	8:54:14 PM	Bubbler valve opened
7/7/2010	8:54:14 PM	Helium MFC set to  500.000000
7/7/2010	8:54:14 PM	H2 MFC set to  0.000000
7/7/2010	8:54:14 PM	BCl3 MFC set to  0.000000
7/7/2010	8:54:14 PM	PHl3 MFC set to  0.000000
7/7/2010	8:54:14 PM	SiCl4 MFC set to  0.000000
7/7/2010	8:54:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	8:54:14 PM	Tube furnace set to 0
7/7/2010	9:14:14 PM	Helium valve closed
7/7/2010	9:14:14 PM	H2 valve closed
7/7/2010	9:14:14 PM	BCl3 valve closed
7/7/2010	9:14:14 PM	PH3 valve closed
7/7/2010	9:14:14 PM	SiCl4 pre valve closed
7/7/2010	9:14:14 PM	SiCl4 post valve closed
7/7/2010	9:14:14 PM	Main Vac valve closed
7/7/2010	9:14:14 PM	Bypass valve closed
7/7/2010	9:14:14 PM	Bubbler valve closed
7/7/2010	9:14:14 PM	Helium MFC set to  0.000000
7/7/2010	9:14:14 PM	H2 MFC set to  0.000000
7/7/2010	9:14:14 PM	BCl3 MFC set to  0.000000
7/7/2010	9:14:14 PM	PHl3 MFC set to  0.000000
7/7/2010	9:14:14 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:14:14 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:14:14 PM	Tube furnace set to 0
7/7/2010	9:14:14 PM	Run finished at 9:14 PM
7/7/2010	9:21:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	9:21:15 PM	Recipe started at 9:21 PM
7/7/2010	9:21:15 PM	Helium valve closed
7/7/2010	9:21:15 PM	H2 valve closed
7/7/2010	9:21:15 PM	BCl3 valve closed
7/7/2010	9:21:15 PM	PH3 valve closed
7/7/2010	9:21:15 PM	SiCl4 pre valve closed
7/7/2010	9:21:15 PM	SiCl4 post valve closed
7/7/2010	9:21:15 PM	Main Vac valve closed
7/7/2010	9:21:15 PM	Bubbler valve closed
7/7/2010	9:21:15 PM	Bypass valve opened
7/7/2010	9:21:15 PM	Helium MFC set to  0.000000
7/7/2010	9:21:15 PM	H2 MFC set to  0.000000
7/7/2010	9:21:15 PM	BCl3 MFC set to  0.000000
7/7/2010	9:21:15 PM	PHl3 MFC set to  0.000000
7/7/2010	9:21:15 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:21:15 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:21:15 PM	Tube furnace set to 0
7/7/2010	9:22:00 PM	Helium valve closed
7/7/2010	9:22:00 PM	H2 valve closed
7/7/2010	9:22:00 PM	BCl3 valve closed
7/7/2010	9:22:00 PM	PH3 valve closed
7/7/2010	9:22:00 PM	SiCl4 pre valve closed
7/7/2010	9:22:00 PM	SiCl4 post valve closed
7/7/2010	9:22:00 PM	Bubbler valve closed
7/7/2010	9:22:00 PM	Main Vac valve opened
7/7/2010	9:22:00 PM	Bypass valve opened
7/7/2010	9:22:00 PM	Helium MFC set to  0.000000
7/7/2010	9:22:00 PM	H2 MFC set to  0.000000
7/7/2010	9:22:00 PM	BCl3 MFC set to  0.000000
7/7/2010	9:22:00 PM	PHl3 MFC set to  0.000000
7/7/2010	9:22:00 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:22:00 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:22:00 PM	Tube furnace set to 0
7/7/2010	9:22:00 PM	Run finished at 9:22 PM
7/7/2010	9:22:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	9:22:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	9:22:27 PM	Recipe started at 9:22 PM
7/7/2010	9:22:27 PM	H2 valve closed
7/7/2010	9:22:27 PM	BCl3 valve closed
7/7/2010	9:22:27 PM	PH3 valve closed
7/7/2010	9:22:27 PM	SiCl4 pre valve closed
7/7/2010	9:22:27 PM	SiCl4 post valve closed
7/7/2010	9:22:27 PM	Main Vac valve closed
7/7/2010	9:22:27 PM	Bypass valve closed
7/7/2010	9:22:27 PM	Bubbler valve closed
7/7/2010	9:22:27 PM	Helium valve opened
7/7/2010	9:22:27 PM	Helium MFC set to  500.000000
7/7/2010	9:22:27 PM	H2 MFC set to  0.000000
7/7/2010	9:22:27 PM	BCl3 MFC set to  0.000000
7/7/2010	9:22:27 PM	PHl3 MFC set to  0.000000
7/7/2010	9:22:27 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:22:27 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:22:27 PM	Tube furnace set to 0
7/7/2010	9:23:44 PM	Helium valve closed
7/7/2010	9:23:44 PM	H2 valve closed
7/7/2010	9:23:44 PM	BCl3 valve closed
7/7/2010	9:23:44 PM	PH3 valve closed
7/7/2010	9:23:44 PM	SiCl4 pre valve closed
7/7/2010	9:23:44 PM	SiCl4 post valve closed
7/7/2010	9:23:44 PM	Main Vac valve closed
7/7/2010	9:23:44 PM	Bypass valve closed
7/7/2010	9:23:44 PM	Bubbler valve closed
7/7/2010	9:23:44 PM	Helium MFC set to  0.000000
7/7/2010	9:23:44 PM	H2 MFC set to  0.000000
7/7/2010	9:23:44 PM	BCl3 MFC set to  0.000000
7/7/2010	9:23:44 PM	PHl3 MFC set to  0.000000
7/7/2010	9:23:44 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:23:44 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:23:44 PM	Tube furnace set to 0
7/7/2010	9:23:44 PM	Run finished at 9:23 PM
7/7/2010	9:23:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2010	9:28:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2010	9:28:22 PM	Recipe started at 9:28 PM
7/7/2010	9:28:22 PM	Helium valve closed
7/7/2010	9:28:22 PM	H2 valve closed
7/7/2010	9:28:22 PM	BCl3 valve closed
7/7/2010	9:28:22 PM	PH3 valve closed
7/7/2010	9:28:22 PM	SiCl4 pre valve closed
7/7/2010	9:28:22 PM	SiCl4 post valve closed
7/7/2010	9:28:22 PM	Main Vac valve closed
7/7/2010	9:28:22 PM	Bubbler valve closed
7/7/2010	9:28:22 PM	Bypass valve opened
7/7/2010	9:28:22 PM	Helium MFC set to  0.000000
7/7/2010	9:28:22 PM	H2 MFC set to  0.000000
7/7/2010	9:28:22 PM	BCl3 MFC set to  0.000000
7/7/2010	9:28:22 PM	PHl3 MFC set to  0.000000
7/7/2010	9:28:22 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:28:22 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:28:22 PM	Tube furnace set to 0
7/7/2010	9:29:09 PM	Helium valve closed
7/7/2010	9:29:09 PM	H2 valve closed
7/7/2010	9:29:09 PM	BCl3 valve closed
7/7/2010	9:29:09 PM	PH3 valve closed
7/7/2010	9:29:09 PM	SiCl4 pre valve closed
7/7/2010	9:29:09 PM	SiCl4 post valve closed
7/7/2010	9:29:09 PM	Bubbler valve closed
7/7/2010	9:29:09 PM	Main Vac valve opened
7/7/2010	9:29:09 PM	Bypass valve opened
7/7/2010	9:29:09 PM	Helium MFC set to  0.000000
7/7/2010	9:29:09 PM	H2 MFC set to  0.000000
7/7/2010	9:29:09 PM	BCl3 MFC set to  0.000000
7/7/2010	9:29:09 PM	PHl3 MFC set to  0.000000
7/7/2010	9:29:09 PM	SiCl4 MFC set to  0.000000
7/7/2010	9:29:09 PM	Bypass solenoid MFC set to  0.000000
7/7/2010	9:29:09 PM	Tube furnace set to 0
7/7/2010	9:29:10 PM	Run finished at 9:29 PM
7/7/2010	9:29:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
